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Results of x-ray mirror round-robin metrology measurements at the APS, ESRF, and SPring-8 optical metrology laboratories

机译:在APS,ESRF和SPring-8光学计量实验室进行X射线镜循环测量的结果

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This paper presents the first series of round-robin metrology measurements of x-ray mirrors organized at the Advanced Photon Source (APS) in the USA, the European Synchrotron Radiation Facility in France, and the Super Photon Ring (SPring-8) (in a collaboration with Osaka University,) in Japan. This work is part of the three institutions' three-way agreement to promote a direct exchange of research information and experience amongst their specialists. The purpose of the metrology round robin is to compare the performance and limitations of the instrumentation used at the optical metrology laboratories of these facilities and to set the basis for establishing guidelines and procedures to accurately perform the measurements. The optics used in the measurements were selected to reflect typical, as well as state of the art, in mirror fabrication. The first series of the round robin measurements focuses on flat and cylindrical mirrors with varying sizes and quality. Three mirrors (two flats and one cylinder) were successively measured using long trace profilers. Although the three facilities' LTPs are of different design, the measurements were found to be in excellent agreement. The maximum discrepancy of the rms slope error values is 0.1 μrad, that of the rms shape error was 3 nm, and they all relate to the measurement of the cylindrical mirror. The next round-robin measurements will deal with elliptical and spherical optics.
机译:本文介绍了在美国的高级光子源(APS),法国的欧洲同步辐射器和法国的超光子环(SPring-8)组织的X射线镜循环测量的第一系列。与大阪大学的合作)。这项工作是这三个机构三方协议的一部分,该协议旨在促进专家之间直接交换研究信息和经验。计量轮循的目的是比较这些设施的光学计量实验室使用的仪器的性能和局限性,并为建立指南和程序以准确执行测量奠定基础。选择用于测量的光学器件以反映镜面制造中的典型以及最新技术水平。轮循测量的第一个系列着眼于具有不同尺寸和质量的平面镜和圆柱镜。使用长迹线轮廓仪连续测量了三个反射镜(两个平面和一个圆柱体)。尽管这三个设施的LTP设计不同,但发现测量结果非常吻合。均方根斜率误差值的最大差异为0.1μrad,均方根形状误差的最大差异为3 nm,并且它们都与柱面镜的测量有关。下一次循环测量将处理椭圆形和球形光学元件。

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