Optimization of Process Parameters Based on Multi-process and Multi-evaluation Index for Function Ceramics in CMP

摘要

To enhance polishing quality,polishing efficiency and improve the backward state based on single-process way for function ceramics in CMP,a new optimization method of process parameters based on multi-process and multi-evaluation theory is put forward.Firstly,based on experimental data obtained from orthogonal experiment,the optimal combinations of process parameters are got separately in term of surface roughness and material removal rate,which is optimized by Taguchi method in each process.Secondly,combining analysis of evaluation index weight ratio with analysis of variance,the final optimal combination of process parameters is received under the integrated evaluation of surface roughness and material removal rate.Finally,the contrast verification results show that the proposed optimization method is effective.