Local deposition of plasma-polymerized films at atmospheric pressure

摘要

Recently reported progress regarding thin film deposition under atmospheric pressure conditions led to increased interests for its application in optics, semiconductor production, automotive, or medical industry. Therefore, extensively research has been performed in the development of atmospheric pressure plasma sources for thin film deposition. Miniaturized non-thermal atmospheric pressure plasma jets represent a suitable tool for local surface coating and thus for the preparation of chemical micro-patterns. Consequently, investigations are of interest concerning the feasibility of plasma jets in surface engineering for customer-specific requirements. So far, two atmospheric pressure plasma jets with different geometries have been developed, which can be used for this purposes