NOVEL BACKEND SINGULATION TECHNIQUES TO ENABLE COMMERCIALIZATION OF OPTICAL MEMS

著录项

• 来源
  《8th International conference on commercialization of micro and nano systems (COMS 2003)》|2003年|458-461|共4页
• 会议地点 Amsterdam(NL);Amsterdam(NL)
• 作者

  James Aberson; Patrick Albert; Pierre Cusin; Bertrand Dutoit; Yann von Kaenel; Heiko Fettig; Ryan Hickey; James Wylde;

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• 作者单位

  Maladiere 83, CH-2007 Neuchatel, Switzerland, +41 32 720 5811, patrick.albert@colibrys.com;

  rnColibrys SA Maladiere 83, CH-2007 Neuchatel, Switzerland;

  rnColibrys SA Maladiere 83, CH-2007 Neuchatel, Switzerland;

  rnColibrys SA Maladiere 83, CH-2007 Neuchatel, Switzerland;

  rnColibrys SA Maladiere 83, CH-2007 Neuchatel, Switzerland;

  rnBookham Technology Plc 1-10 Brewer Hunt Way, Kanata, ON, K2K 2B5, Canada;

  rnBookham Technology Plc 1-10 Brewer Hunt Way, Kanata, ON, K2K 2B5, Canada;

  rnBookham Technology Plc 1-10 Brewer Hunt Way, Kanata, ON, K2K 2B5, Canada, +1 613 270 4001, james.wylde@bookham.com;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

• 入库时间 2022-08-26 13:58:36