DESIGN AND DEVELOPMENT OF MICROSYSTEMS FOR LIMITED QUANTITIES ON A COMMERCIAL BASE

机译：商业基础上数量有限的微系统的设计与开发

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来源
《8th International conference on commercialization of micro and nano systems (COMS 2003)》|2003年|476-479|共4页
会议地点 Amsterdam(NL);Amsterdam(NL)
作者
Rob M.E.M. van Heijster;
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作者单位

TNO-Physics and Electronics Laboratory P.O. Box 96864 2509 JG The Hague The Netherlands Phone+3170 374 0385 Fax:+3170 374 0653 E-mail: vanheijster@fel.tno.nl;

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入库时间 2022-08-26 13:58:35

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DESIGN AND DEVELOPMENT OF MICROSYSTEMS FOR LIMITED QUANTITIES ON A COMMERCIAL BASE

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