An ultrasensitive humidity sensor based on SnO2-modified MoS2nanocomposite at low-humidity range

摘要

This paper reports an ultrasensitive capacitive humidity sensor for low-humidity detecting environment, which employs SnO2-modified MoS2 (SnOn₂n/MoSn₂n) hybrid nanocomposite film as sensing layer and interdigital electrodes with narrow gap of 15 μm on sapphire substrate. The testing results show that the sensor of SnOn₂n/MoSn₂n(10: 1) composite has the best sensitivity of 387.5 μF/%RH at the humidity range of 0-20% relative humidity (RH). To our best knowledge, this sensitivity value is higher than that of all reported humidity sensors at low-humidity range. Moreover, the humidity sensor also has fast response (15s), little hysteresis and good repeatability.