All-electrical transduction of black phosphorus tunable 2D nanoelectromechanical resonators

摘要

We report on the first all-electrically transduced and frequency tunable two-dimensional (2D) vibrating nanoelectromechanical resonators enabled by using atomic layer black phosphorus (P) crystal. The resonance (at fn_resn) is detected using a down-mixing technique with frequency modulation (FM), and is verified by well established optical readout. The black P resonator suspended on a circular microtrench exhibits resonance in the high frequency band (fn_resn~24MHz). In addition to efficient frequency tuning via the electrostatic gate, we have examined photon sensing capability using the black P resonator. Thanks to the small bandgap of black P (Eg≈0.3eV for multilayer thin films), it absorbs emission from visible to mid-infrared (IR), which makes the black P nanoresonators a potential candidate for enabling IR detectors, by utilizing the nanoelectromechanical systems (NEMS) platform and all-electrical signal transduction.