Design specific APC: dedicated spatial compensation using design analysis and product classification

摘要

Process control schemes in general are dependent on the specific product mix and the production conditions under which a control is exerted. If, for example, a product mix contains only two types of well characterized products the control scheme can be set up using two product specific sets of control parameters. Also high volume production can benefit from direct feedback of recent production data into the control parameters. Mask manufacturing, however, requires a distinct set up of the control scheme, as the typical control situation is characterized by a large heterogeneity of potentially sub-optimally characterized products with a very low volume. Thus, the AMTC has set up control schemes capable of computing control parameters for large diversity of products based on a heterogeneous and sparse product data base.