首页> 外国专利> THERMAL CONDUCTIVITY ESTIMATION METHOD, THERMAL CONDUCTIVITY ESTIMATION APPARATUS, PRODUCTION METHOD FOR SEMICONDUCTOR CRYSTAL PRODUCT, THERMAL CONDUCTIVITY CALCULATOR, THERMAL CONDUCTIVITY CALCULATION PROGRAM, AND, THERMAL CONDUCTIVITY CALCULATION METHOD

THERMAL CONDUCTIVITY ESTIMATION METHOD, THERMAL CONDUCTIVITY ESTIMATION APPARATUS, PRODUCTION METHOD FOR SEMICONDUCTOR CRYSTAL PRODUCT, THERMAL CONDUCTIVITY CALCULATOR, THERMAL CONDUCTIVITY CALCULATION PROGRAM, AND, THERMAL CONDUCTIVITY CALCULATION METHOD

机译:导热估计方法,导热估计装置,半导体晶体产品的生产方法,导热性计算器,导热性计算程序,以及导热性计算方法

摘要

A thermal conductivity estimation method includes: measuring temperature distribution of a measurement sample surface in a steady state by partially heating the measurement sample under predetermined heating conditions; calculating temperature distribution of a sample model surface by performing a heat-transfer simulation on the sample model of the same shape as the measurement sample for a plurality of combinations of provisional thermal conductivities and heating conditions; making a regression model, whose input is temperature distribution of the measurement sample surface and whose output is a thermal conductivity of the measurement sample, by a machine learning technique using training data in a form of a calculation result of the plurality of combinations and the temperature distribution obtained from the plurality of combinations; and estimating the thermal conductivity of the measurement sample by inputting a measurement result of the temperature distribution of the measurement sample surface into the regression model.
机译:导热率估计方法包括:通过在预定的加热条件下部分地加热测量样品,测量稳定状态下测量样品表面的温度分布;通过在与临时热导体和加热条件相同的形状的样品模型上进行传热模拟来计算样品模型表面的温度分布。制作回归模型,其输入是测量样本表面的温度分布,并且其输出是测量样品的导热率,通过使用多种组合的计算结果的形式的训练数据,通过机器学习技术和温度从多个组合获得的分布;通过将测量样本表面的温度分布的测量结果输入回归模型来估计测量样品的导热率。

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