Metrology for organic light emitting diode fabrication using photoluminescence spectroscopy

摘要

An apparatus for identifying the characteristics of a photoluminescence (PL) layerA light source that generates excitation light including light from visible or near visible spectrumAn optical assembly configured to guide excitation light on a pl layerThe PL radiation is generated by the PL layer in response to the excitation light interacting with the PL layer.Detectors configured to generate signals based on PL radiationAndA computer device connected to a detector;Signal received from the detectorIncludes a computational device configured to identify the PL layer characteristics based on the signal.Diagram