INFILLING SHEET FOR PLASMA DEVICE, PART FOR PLASMA DEVICE COMPRISING SAID INFILLING SHEET, AND PLASMA DEVICE COMPRISING SAID INFILLING SHEET

摘要

An infilling sheet for a plasma device is described. In particular, an infilling sheet for a plasma device including a fluororesin sheet substrate including a first side and a second side opposite to the first side, and a glassy coating disposed on at least the first side of the fluororesin sheet substrate, and the fluororesin sheet substrate has a storage elastic modulus from 3 × 10⁶ Pa to 2 × 10⁸ Pa in all the temperature range from 150°C to 250°C is described.