Process for purifying gas feeding of high purity helium group containing at least one of oxygen, hydrogen or moisture.Purificacao system capable of changing or reversing the flow of the gas contaminated from the group of Helio.Purificacao system capable of changing or reversing the flow of gas from the group of Helio and able to be used at a point of use of the gas of the group of high purity helium.

摘要

Processes and systems for purifying high purity helium group gas which may have been contaminated with water, oxygen and/or hydrogen during its transmission to customers' sites.