Procedure and detecting device for the electronic spatial detection of radiation

摘要

The method and the device for decoupling the image signal in position-providing high-vacuum detector devices for electromagnetic radiation quanta or particles, which in the case of electromagnetic radiation via a photo-electron converter layer (4) and in the case of particle radiation directly via an electron multiplier (3) as an electron avalanche ( 8) impinging on a spatially resolving anode structure (2) are distinguished according to the invention in that the electron avalanche (8) is first briefly collected inside the vacuum (7) on the anode side by a high-resistance conductive semiconductor thin layer (1) and through the glass bottom (counter substrate 6 ) the detector device is capacitively read out from the outside as an image charge by means of a low-resistance anode layer (2) which is suitably structured for location determination. This capacitive coupling enables a high spatial resolution if the internal resistances of the charge collecting layer (1) on the one hand and the readout anode layer (2) on the other hand are optimally matched to one another. The type of coupling according to the invention requires only a simple high-resistance monolayer with a single voltage contact (11) in vacuum (7). The spatially resolving anode structure (2) outside the vacuum (7) can be modified and exchanged as desired, so that the spatial resolution can be individually adapted. IMAGE