Device for producing a plasma, enabling microwave propagation and absorption zones to be dissociated having at least two parallel applicators defining a propogation zone and an exciter placed relative to the applicator

摘要

The invention relates to a distribution device for distributing microwave power to excite a plasma inside an enclosure. According to the invention, the distribution device includes at least one second applicator of microwave energy to co-operate with a first applicator and an exciter to form at least one excitation triplet in which firstly the first applicator and the second applicator are mounted substantially parallel to each other and are spaced apart by a given amount to define between them a propagation zone for microwave energy, and secondly the exciter is disposed inside the enclosure by being placed relative to the first and second applicators in such a manner that the trajectories of the electrons do not cross the propagation zone, thereby dissociating the propagation zone and the absorption zone.