Method for manufacturing cantilever drive mechanism, the method of manufacturing a probe driving mechanism, the cantilever driving mechanism, a probe driving mechanism, and a multi-probe driving mechanism using the same scanning tunneling microscope, an information processing apparatus

摘要

A method of manufacturing a cantilever drive mechanism arranged in such a manner that a cantilever portion, in which a piezoelectric layer is disposed between electrode layers, and a circuit portion, which is positioned adjacent to the cantilever portion and which drives the cantilever, are formed on the same substrate. The method includes the steps of first forming the circuit portion and then forming the cantilever portion after the circuit portion has been formed. IMAGE