Wavefront phase linkage method of by fringe scanning interference measurement method

摘要

PURPOSE: To obtain a two-dimensionally continuous phase distribution by the simple processing of less scanning number of times by performing the phase linking of the phase data of the neighboring pixel at the outermost periphery of the obtained phase data, and thereafter performing the phase linking of the phase data of the noted pixel and the phase data of the neighboring pixel. ;CONSTITUTION: An image region E comprises a phase data region A, having the detected data of interference fringes on an image memory, and a background region B having no detected interference fringes. At first, the boundary line of the regions A and B is tracked. The phase data of the neighboring pixels forming the boundary line are sequentially connected. The phase data region A is sequentially scanned from the tracking starting point, and the neighboring boundary point is obtained. When the scanning returns to the tracking starting point, the boundary line connecting respective points is obtained. Then, the phase difference is obtained from the neighboring phase data on the obtained boundary line. The phase skipping is judged based on whether the phase difference is larger than the specified threshold value or not. Furthermore, the phase-data regions are sequentially scanned, and the phase linking of the phase data of the noted pixel and the phase data of the neighboring pixel is performed.;COPYRIGHT: (C)1996,JPO