DEPOSITION SIMULATION METHOD, RECORDING MEDIUM RECORDED WITH DEPOSITION SIMULATION METHOD, AND SIMULATION DEVICE LOADED WITH DEPOSITION SIMULATION METHOD

摘要

PROBLEM TO BE SOLVED: To improve arithmetic precision in terms of a minute surface region of an object in simulation of a two dimensional surface configuration, in which the surface configuration of the object is represented by a string model.;SOLUTION: A digitization equation is formulated so as to satisfy a mass conservation law that a flow volume and a deposition volume in an extremely short time Δt and in the minute surface region, are equal with each other. The flow volume is expressed by a diffusion flux using the Nernst-Einstein formula, and the deposition volume is expressed by an area of deposition in the extremely short time Δt and in the minute surface region, with a speed level in terms of a deposition direction, which is shown by a normal line from each point, being an undetermined variable. The obtained digitization equation is a nonlinear simultaneous equation relating to speed. The speed can be obtained by linearizing the non-linear term for iteration focusing. The coefficient matrix of the simultaneous linear equation formulated by the linearization is a triple band matrix, and thus a calculation can be conducted rapidly by using a faster solution method of a three-term equation.;COPYRIGHT: (C)2003,JPO