Active vibration compensation apparatus e.g. for atomic force microscope, digitizes sensor signals, supplies to digital data processor for analysis, and controls actuator accordingly

摘要

The apparatus includes an actuator for applying forces or deflecting a table (11) based on signals from one or more sensors (17). A control circuit (16) receives and processes the sensor signals and drives the actuator(s). A digital data processor is used to process the sensor signals. An interface including at least one A/D converter digitizes the sensor signals for supply to the digital data processor. The processor analyzes sensor signals produced at different times.