Chemical prefiltering for phase differentiation via simultaneous energy dispersive spectrometry and electron backscatter diffraction

摘要

An analytical method for combining chemical information with crystallographic information to obtain a map of the crystal orientation, the nature of grain boundaries, and distinguishing crystalline phases in a polycrystalline sample, including the steps of providing a sample with a prescribed grid of points thereon, selecting a point, applying a collimated electron beam to the point to obtain an electron backscatter diffraction (EBSD) pattern and the elemental composition of the sample at the point. Recording the information and repeating for each point in the grid and determining the crystalline phases in the sample. An instrument capable of performing the method includes an SEM having means for applying an electron beam to a sample, means for obtaining an EBSD pattern (EBSP), and means for determining the composition of the sample, as well as means for recording EBSD band locations and characteristics and the elemental composition of the sample.