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MASKLESS LITHOGRAPHY SYSTEM FOR FORMING GRAY SCALE PATTERN ON OBJECT AND METHOD FOR FORMING GRAY SCALE PATTERN ON OBJECT BETWEEN MASKLESS LITHOGRAPHY
MASKLESS LITHOGRAPHY SYSTEM FOR FORMING GRAY SCALE PATTERN ON OBJECT AND METHOD FOR FORMING GRAY SCALE PATTERN ON OBJECT BETWEEN MASKLESS LITHOGRAPHY
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机译:在对象上形成灰度图案的无掩膜光刻系统和在对象之间形成灰度图案的方法
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摘要
PROBLEM TO BE SOLVED: To provide a method for forming a better gray scale pattern by using relatively less pulses (for example, 2 to 4 pulses) at each feature.;SOLUTION: An exposure light pattern having spatially changeable intensity is formed by illuminating light on an array of a spatial light modulator and patterning the light with SLM, the patterned light is written on the object and the gray-scaled pattern is formed on the object based on the above-mentioned spatially changeable intensity.;COPYRIGHT: (C)2005,JPO&NCIPI
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