PRECISION CALIBRATION METHOD FOR COORDINATE MEASUREMENT, EVALUATION METHOD FOR COORDINATE MEASUREMENT PRECISION, AND PROGRAM AND MASK

摘要

PROBLEM TO BE SOLVED: To provide a coordinate measurement precision calibration method and a program for executing the calibration method, capable of readily grasping an error of a coordinate-measuring device, and performing accurate calibration.;SOLUTION: The absolute positions of a plurality of marks formed on a measuring object are measured by the coordinate measuring device (step ST3), and the relative position between the marks is measured by a superposition precision measuring device (step ST4). The relative position between the marks is determined, based on the absolute positions of the marks measured in the step ST3. Then, consistency, between a measured value of the relative position between the marks measured by the superposition precision measuring device and a calculated value of the relative position between the marks calculated, based on the absolute positions of the marks, is determined (step ST6). When it is determined that there is no consistency, the coordinate-measuring device is calibrated (step ST7).;COPYRIGHT: (C)2005,JPO&NCIPI