MASK FITTING JIG AND MASK FITTING METHOD USING THE SAME MASK FITTING JIG

摘要

PROBLEM TO BE SOLVED: To press the whole mask uniformly against a mask holding means while preventing one end of the mask from being clamped and damaged by a mask holding means when the mask is fitted to the mask holding means.;SOLUTION: The mask fitting jig 2 for holding the mask 3 by the mask holding means 3 in a light irradiation device in which a work mounted on a work stage 1 is irradiated with ultraviolet rays through the mask 3 while the mask 3 having a pattern formed is held on the reverse surface of the mask holding means 3 comprises a frame 21 which has a plurality elastic members 22 installed on its reverse and a protecting material 24 which is provided on the frame 21, kept plane, and lower than glass in hardness, and also has a plurality of grooves on the surface.;COPYRIGHT: (C)2005,JPO&NCIPI