FLUIDIZED MATERIAL FILLING APPARATUS AND FLUIDIZED MATERIAL FILLING METHOD INCLUDING FIRST CLOSED SPACE PRESSURE REDUCTION STEP, SECOND CLOSED SPACE PRESSURE REDUCTION STEP, MOVING STEP, FLUIDIZED MATERIAL DEPOSITING STEP, AND FILLING STEP

摘要

PURPOSE: An apparatus and a method are provided to fill fluidized materials in holes formed at a surface of a seat such that air bubble is not formed. CONSTITUTION: A fluidized material filling method comprises a first closed space pressure reduction step of forming a first closed space in a first region on a seat member(11) having holes, and reducing pressure in the first closed space; a second closed space pressure reduction step of forming a second closed space in a second region formed in the vicinity of the first region, storing a fluidized material in the second closed space, and reducing pressure in the second closed space such that the second closed space has a vacuum level lower than that of the first closed space; a moving step of moving the seat member in the first closed space to the second closed space; a deposition step of depositing the fluidized material stored in the second closed space onto the surface of the seat member in the second region; and a filling step of filling the fluidized material deposited on the seat member into the hole.