METHOD FOR FORMING OXIDE ANODE OF ORGANIC ELECTROLUMINESCENCE DEVICE, INCLUDING STEPS OF FORMING DOPED OXIDE ELECTRODE LAYER ON SUBSTRATE AND FORMING SURFACE OXIDE LAYER ON OXIDE ELECTRODE LAYER THROUGH ATOMIC LAYER DEPOSITION PROCESS, AND ORGANIC ELECTROLUMINESCENCE DEVICE INCLUDING OXIDE ANODE LAYER

摘要

PURPOSE: A method and an organic electroluminescence device are provided to control a work function and achieve improved characteristics even in a low temperature processing by forming a surface oxide layer on an oxide electrode through the use of an atomic layer deposition process. CONSTITUTION: A method comprises a first step of forming a doped oxide electrode layer on a substrate; and a second step of forming a surface oxide layer on the oxide electrode layer through an atomic layer deposition process. The first step includes a first sub-step of repeating, several times, a process of forming an oxide base layer by using a surface chemical reaction or a mixed deposition method of a surface chemical reaction and a vapor chemical reaction; a second sub-step of repeating, several times, a process of doping the oxide base layer with a dopant; and a third sub-step of repeating, several times, a total process including the first and second sub-steps.