ELECTRON BEAM POSITION FLUCTUATION MEASUREMENT METHOD, ELECTRON BEAM POSITION FLUCTUATION MEASUREMENT DEVICE, AND ELECTRON BEAM RECORDING DEVICE

摘要

When measuring beam position fluctuation before performing recording by an electron beam recording device, it is possible to measure a stable and accurate fluctuation amount. A measurement device (10) measures position fluctuation of an electron beam Ep before performing recording. The measurement device (10) includes a knife edge (11) arranged at the radiation position of the beam spot Ep, detection means (Faraday cup (12), etc.) for detecting the electron beam E applied via the knife edge (11), filter means (high-range cut filter (14), etc.) for removing the fluctuation frequency component of the measurement object from the output of the detection means, and control means (15) for controlling the reference position of the electron beam E so that the center of the beam spot Ep is at the tip end position of the knife edge (11) according to the output of the filter means. The position fluctuation of the beam spot Ep is measured by the output change of the detection means when the center of the beam spot Ep is shifted from the tip end of the knife edge (11).