test that can determine the leakage current due to the particle size and particle generation patterns

摘要

particles (particle) caused by leakage current and to determine the particle size of the test pattern can (test pattern) provides . According to one aspect of the invention there is provided a plurality of contacts to be introduced when the test pad (pad) of , and electrically connected to each of the pads , and is introduced to the particles to be separated from each other , if the lead particles are introduced between the mutual by including a test pattern for leakage current measurement, spaced interval between measurement patterns present a different interval of check for leakage current test pattern in accordance with the pad .