Micro-test piece for calibration and checking of dimensional measuring devices has arrangement of pyramids on one surface of test piece produced through forming of arrangement of pyramids etched into silicon wafer

摘要

The micro-test piece for the calibration and checking of dimensional measuring devices has an arrangement of pyramids on one surface of the test piece which is produced through a forming of an arrangement of pyramids etched into a silicon wafer. The base surfaces of the pyramids arranged on the test piece have the same orientation in relation to the crystal structure of the silicon. Different sizes of pyramid can be arranged with different spacing on the surface of the test piece.