Micro-lens in-line curvature monitoring method, involves measuring diameters or areas of respective circles in micro-lens, and calculating curvature of lens using two diameters or areas of measured circles

摘要

The method involves measuring diameters or areas of respective circles in a micro-lens (104) by focusing a scope substantially on a top and lower point of the lens, respectively. The curvature of the micro-lens is calculated using the two diameters or areas of the measured circles. The circles have a difference of contrast from a larger circle corresponding to a diameter of the micro-lens. Independent claims are also included for the following: (A) a medium or waveform containing a computer-readable set of instructions adapted to perform a method for monitoring a curvature of a micro-lens in-line (B) a system for calculating a curvature of a micro-lens.