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Production of structured layers of transparent conducting oxides on semiconductor layers or carbon modifications used in opto-electronic components comprises structuring the semiconductor layer and sputtering the conducting oxide
Production of structured layers of transparent conducting oxides on semiconductor layers or carbon modifications used in opto-electronic components comprises structuring the semiconductor layer and sputtering the conducting oxide
Production of structured layers of transparent conducting oxides on semiconductor layers or carbon modifications comprises structuring the semiconductor layer by self organization during its growth or by subsequent treatment and sputtering the transparent conducting oxide on the semiconductor layer.
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