POSITION CORRECTION COEFFICIENT CALCULATING METHOD OF CHARGED PARTICLE BEAM DRAWING APPARATUS, AND POSITION CORRECTION COEFFICIENT UPDATING METHOD OF CHARGED PARTICLE BEAM DRAWING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a method for reducing a time to be taken for calculating a correction efficient, and to provide a method for updating the correction coefficient.;SOLUTION: The position correction coefficient calculating method of an electron beam drawing apparatus, which is one mode of calculating a coefficient of an approximate expression for correcting a misregistration due to a structure of the electron beam drawing apparatus, comprises the scan step of scanning a plurality of marks arranged regularly in an overall region equivalent to a drawing region of a sample to be drawn on a stage by use of charged particle beams (S102); and the coefficient calculating step of fitting a misregistration amount of each mark scanned in a coordinate system of the drawing apparatus to calculate the coefficient of the approximate expression fitted (S104).;COPYRIGHT: (C)2008,JPO&INPIT