laser-induced particle targets for thin pole mount and ultra-thin plastic target groove is formed for the generation of plastic target fixation

摘要

A target mount and a method thereof are provided to prevent a tear of an ultra thin film plastic target by easily fixing one side of the ultra thin film plastic target to a laser focusing surface. A first fixing groove(11) is formed on a top side of a plurality of target fixing plates(10). A pressurizing member(40) is fixed to a specified position of the target fixing plate by the first fixing groove. A plurality of laser focusing plates(20) is positioned in a bottom side of the target fixing plate. A second fixing groove(21) for forming a laser focusing surface(23) is formed on a specified position of a top side of the laser focusing plate. An ultra thin film plastic target(30) is positioned between the target fixing plate and the laser focusing plate. The ultra thin film plastic target contacted with the pressurizing member is fixed to an inner side of the second fixing groove of the laser focusing plate.