STRUCTURE FACTOR TENSOR ELEMENT DETERMINATION METHOD, AND X-RAY DIFFRACTION DEVICE UTILIZATION METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To solve various problems existing in the case of using an ellipsometric crystal for quick determination of a structure factor tensor and improvement of measurement sensitivity, though an ellipsometric method of an X-ray domain which is necessary for determining the structure factor tensor of a material is already proposed.;SOLUTION: In this method, the structure factor tensor can be determined without using the ellipsometric crystal, by measuring and analyzing incidence polarization dependency of scattered X-ray intensity from a sample.;COPYRIGHT: (C)2010,JPO&INPIT