The hyperfractionation doing the control field of the coating liquid which from the coating liquid emission control device null coating liquid emission opening which uses

摘要

PROBLEM TO BE SOLVED: To perform the flow quantity detection and the flow quantity setting of a coating liquid discharged form a curtain coater head precisely for a short time.;SOLUTION: A flow quantity adjusting zone Z multi-divided uniformly in the width direction is formed in a coating liquid discharge port 4a part of the curtain coater head 4. Hoppers 11 having a size corresponding to the width of the flow quantity adjusting zone Z are arranged to be placed in a raw in the lower part of the curtain coater head 4. The upper end of a flow passage pipe 13 provided with a flow meter 12 is connected to the lower end part of each hopper 11. Each flow quantity adjusting zone Z is formed to be adjusted by the actuator 9. A controller 14 for controlling each actuator based on the detected value of the flow meter 12 is provided.;COPYRIGHT: (C)2002,JPO