With the occulter based board and the said occulter based board where

摘要

PROBLEM TO BE SOLVED: To provide a film forming apparatus for forming a thin film with high adhesiveness and high quality by preventing contamination in a film forming space caused by degassing in cleaning as well as effectively cleaning a surface of substrate and a material source for thin film.;SOLUTION: The film forming apparatus having several substrate holders for holding substrates, a material source for thin film, and a shutter capable of evacuating arranged between the substrate holders and the material source for thin film, in a film forming chamber, and the film forming method using the apparatus, comprise simultaneously carrying out a process of removing contaminants adhered to the surface by heating the surface of the substrates with one or several plate heaters for heating substrates, which are provided on the shutter in a corresponding way to each substrate, and a process of removing contaminants on the surface of the material source for thin film by plasma or heating; and comprise cooling a shutter composing member other than the plate heater by means of arranging refrigerant passage around the plate heater.;COPYRIGHT: (C)2002,JPO