ELECTRIC SIGNAL INTERFACE APPARATUS, CAPABLE OF REMOVING INTERFACE FAILURE BETWEEN PROBE AND PAD AND BETWEEN PROBE AND CIRCUIT BOARD REGARDLESS OF RELATIVE POSITION MISMATCH BETWEEN PROBE AND PAD

摘要

PURPOSE: An electric signal interface apparatus is provided to improve convenience as a test apparatus, by assembling a probe unit or installing a probe support body on the circuit board using a screw.;CONSTITUTION: A conductive pattern consisting of a conductor including a probe function is formed on a resin film by etching a metallic film using the resin film attached with the metallic film. A probe unit(704) is supported by plural supporting plates by arranging plural resin film type probes in parallel. The plural resin film type probes correspond to a pad of one or plural semiconductor chips to be tested. A first probe holder(705) of lattice form installs plural openings. A second probe holder(706) has a protruded part at the cross point of lattices in the same type as the first probe holder. The probe unit is independently arranged and fixed at every opening.;COPYRIGHT KIPO 2010