MEDIUM ENERGY ION SCATTERING SPECTROMETER CAPABLE OF MEASURING OR MAPPING A PRECISE AREA

摘要

PURPOSE: A medium energy ion scattering spectrometer is provided to precisely analyze the movement of atoms at a surface and interface by measuring accurate scattering angle and position of ion beam according to time.;CONSTITUTION: A medium energy ion scattering spectrometer comprises an ion source(10), a collimator(20) which turns ion from the ion source into collimated beam, an accelerator(30), an ion beam pulse generator(40) which makes the accelerated ion beam into pulses to create ion beam flux, a concentration objective lens(50), a detector(60), and a data analyzer which transmits a detected spectral signal and analyzes data.;COPYRIGHT KIPO 2010