SUBSTRATE TRANSFER SYSTEM CAPABLE OF SPEEDY WAFER MAPPING, CAPABLE OF PREVENTING AN ERROR IN MAPPING A WAFER

摘要

PURPOSE: A substrate transfer system is provided to improve mapping speed by mapping a plurality of wafers thorough a plurality of mapping sensor at the same time.;CONSTITUTION: A substrate housing is loaded in a load port. A plurality of mapping sensor bars(310) are included in the rear side of a door holder of the door opener opening/ closing the door of the substrate housing. The mapping sensor bars corresponds to the number of the semiconductor substrates which are settled on a slot in the substrate housing. A wafer mapping member maps a plurality of semiconductor substrates through a detection sensor(320). The detection sensor is attached to one end of mapping sensor bars.;COPYRIGHT KIPO 2010