Method for measuring thermophyscal properties using scanning thermal microscope(SThM)

摘要

PURPOSE: A tensile strength test apparatus for a thin film formed on a flexible substrate is provided to measure the temperature of a test piece and reduce an affect of heat transmission through the air. CONSTITUTION: A tensile strength test apparatus for a thin film formed on a flexible substrate comprises a thermophysical amount measuring step and a thermophysical amount acquisition step. The contact mode heat physical quantity of a test piece is measured by injecting a probe(10) of a scanning probe heat microscope to the test piece in the thermophysical amount measuring step. The lift mode heat physical quantity of the test piece is measured by injecting the probe of the scanning probe heat microscope to the test piece while the probe and the test piece are separated. The lift mode heat physical quantity and the contact mode heat physical quantity are compared each other in the thermophysical amount acquisition step.