Vacuum valve for semiconductor manufacturing, flat screen manufacturing, laser technology, glass and tool coating, metallurgy, surface analyzation and high-energy physics, has sealing ring provided with cross-section

摘要

The vacuum valve has a sealing ring (30a) provided with a cross-section. The cross-section has an outer contour (32) made of six sheet sections (1x,2v,3v,4x,5x,6v). One of the sheet sections is dimensioned and is formed in such a manner that it is protruded from a groove opening, and forms a front section (31). An end of one convex sheet section is exchanged into another sheet section.