VALUATION METHOD OF DIELECTRIC BREAKDOWN LIFETIME OF GATE INSULATING FILM, VALUATION DEVICE OF DIELECTRIC BREAKDOWN LIFETIME OF GATE INSULATING FILM, AND PROGRAM FOR EVALUATING DIELECTRIC BREAKDOWN LIFETIME OF GATE INSULATING FILM

摘要

PROBLEM TO BE SOLVED: To provide a valuation method of a dielectric breakdown lifetime of a gate insulating film, which allows to decide determination condition of soft breakdown uniquely.;SOLUTION: The valuation method performs: a process S1 of deciding a Weibull slope of lifetime distribution until reaching a soft breakdown of the gate insulating film of the MOS type element; a process S2 of deciding a detection condition of the soft breakdown from the decided Weibull slope after the above step; and a process S3 of executing a dielectric breakdown test by using the decided detection condition, when evaluating the dielectric breakdown lifetime of the gate insulating film of the MOS type element.;COPYRIGHT: (C)2011,JPO&INPIT