FLEXIBLE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER ARRAY WITH INCREASED EFFECTIVE CAPACITANCE
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机译:有效电容增加的柔性电容式微机超声传感器阵列
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摘要
A Capacitive Micromachined Ultrasonic Transducer (CMUT) having a membrane operatively connected to a top electrode and having a bottom electrode having a concave void. When a DC bias voltage is applied, the membrane is deflected towards the bottom electrode such that a peripheral edge region of the membrane is brought into close proximity with the bottom electrode and an electrostatic force proximal to the peripheral edge region of the membrane is increased.
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