Procedure for fabricating deformation sensors with a strain gauge as well as for fabricating strain gauges and resulting deformation sensors and strain gauge

摘要

it is a method for producing verformungssensoren with strain gauges (30) is proposed, the electrical structures to detect deformation in a oberflu00e4chenabschnitt of verformungssensors is upset. erfindungsgemu00e4u00df is a oberflu00e4chenbereich a halbleiterwafers in a predetermined thickness poru00f6siziert.then, on the poru00f6sizierten layer at least part of the detection of deformation necessary electric dms structures of a variety of dms structures from the poru00f6sizierten upset and halbleiterwafer layer breaking point cut off.finally, the separate dms structures, each with a oberflu00e4chenabschnitt of verformungssensoren connected. the subject of the invention is also the process for the production of the strain gauges (30), and a verformungssensor and strain gauges.