MOLD FOR THERMAL NANOIMPRINT LITHOGRAPHY, PROCESS FOR FABRICATING THE SAME, AND NANOIMPRINT PROCESS USING THE SAME

摘要

A heating mold for thermal nanoimprint lithography comprising resistive heating means and collecting means for collecting the electromagnetic energy of a variable electromagnetic field emitted by a source located outside the mold, said collecting means being connected to said resistive heating means (34) in which said energy is dissipated.;Method for manufacturing this mold.;A thermal nanoimprint lithography device comprising said mold.;A method for preparing a substrate comprising a surface nanostructured by a thermal nanoimprint lithography technique, wherein said mold is applied.