MICRORESONATOR, RESONATOR SENSOR WITH SUCH MICRORESONATOR, AND SENSOR ARRAY COMPRISING AT LEAST TWO SUCH MICRORESONATORS

摘要

A microresonator for use as a resonator in a detector is disclosed. In one aspect, the microresonator has a first predetermined resonance mode. The microresonator has an integrated electronic transducer for measuring deformation of the microresonator in the first predetermined resonance mode of the microresonator. The transducer is located at a local deformation of the predetermined resonance mode to measure the deformation of the microresonator at such location. The first predetermined resonance mode may be one of higher order resonance modes.