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Process for producing oriented inorganic crystalline film, and semiconductor device using the oriented inorganic crystalline film
Process for producing oriented inorganic crystalline film, and semiconductor device using the oriented inorganic crystalline film
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机译:取向无机结晶膜的制造方法以及使用该取向无机结晶膜的半导体装置
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摘要
In a process for producing an oriented inorganic crystalline film, a non-monocrystalline film containing inorganic crystalline particles is formed on a substrate by a liquid phase technique using a raw-material solution which contains a raw material and an organic solvent, where the inorganic crystalline particles have a layered crystal structure and are contained in the raw material. Then, the non-monocrystalline film is crystallized by heating the non-monocrystalline film to a temperature equal to or higher than the crystallization temperature of the non-monocrystalline film so that part of the inorganic crystalline particles act as crystal nuclei.
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