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STRUCTURE OF A RESISTIVE SWITCHING DEVICE WITH TWO TERMINALS CAPABLE OF HAVING CHARACTERISTICS OF RANDOM ACCESS AND HIGH SPEED SWITCHING AND A FABRICATING METHOD THEREOF
STRUCTURE OF A RESISTIVE SWITCHING DEVICE WITH TWO TERMINALS CAPABLE OF HAVING CHARACTERISTICS OF RANDOM ACCESS AND HIGH SPEED SWITCHING AND A FABRICATING METHOD THEREOF
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机译:具有两个具有随机访问和高速切换特性的终端的电阻切换装置的结构及其制造方法
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摘要
PURPOSE: The structure of a resistive switching device with two terminals and a fabricating method thereof are provided to prevent a short circuit between a bottom electrode and an upper electrode without exposing a sidewall of a switching material during the etching of the upper electrode.;CONSTITUTION: Provided is a substrate(302) including a surface region. A first dielectric substance(402), which covers the surface region of the substrate, is formed. A first adhesive layer(502), which covers the first dielectric substance, is deposited. A lower wire material(602), which covers the first adhesive layer, is deposited. A second adhesive layer(702), which covers a lower wire structural material, is deposited. A switching material(902), which covers the second adhesive layer, is formed. A masking layer(1002), which covers the switching material, is formed.;COPYRIGHT KIPO 2012
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