Optical component, useful for a transmission of radiation, comprises a paint-like radiation-protective layer that comprises oxide material including germanium dioxide, antimony pentoxide, aluminum oxide and niobium pentoxide

摘要

The optical component comprises a paint-like radiation-protective layer (41) that comprises oxide material including germanium dioxide, antimony pentoxide, aluminum oxide, niobium pentoxide, tin oxide, oxides of rare earths metal such as lanthanum oxide, ceria oxide, yttrium oxide, yttrium-aluminum-oxide, zinc oxide, indium oxide, bismuth trioxide, barium titanate and spinel such as magnesium aluminate. The oxide material is included in an inorganic bonding agent: of the paint-like radiation-protective layer; and in the form of nanoparticles. The optical component comprises a paint-like radiation-protective layer (41) that comprises oxide material including germanium dioxide, antimony pentoxide, aluminum oxide, niobium pentoxide, tin oxide, oxides of rare earths metal such as lanthanum oxide, ceria oxide, yttrium oxide, yttrium-aluminum-oxide, zinc oxide, indium oxide, bismuth trioxide, barium titanate and spinel such as magnesium aluminate. The oxide material is included in an inorganic bonding agent: of the paint-like radiation-protective layer; and in the form of nanoparticles. The radiation-protection layer is impermeable for a radiation having a wavelength of less than 220 nm, and has a transmission of more than 40% for the radiation having the wavelength of more than 380 nm. An adhesive layer (43) is applied on the radiation-protection layer. The material of the adhesive layer is curable by the radiation. A hydrophobic layer is applied on the radiation-protection layer that is formed outside of an optical free diameter of the optical component. The radiation-protection layer, the adhesive layer and/or the fluid-rejecting layer are applied by a method comprising sputtering, physical vapor deposition, chemical vapor deposition, plasma-enhanced chemical vapor deposition, cold gas spraying, rotation coating, plasma spraying, dipping coating and manual coating such as brushing or applying with a sponge, or by a sol gel process. A transparent material is formed for UV-radiation having the wavelength of less than 260 nm. The optical component comprises a conic portion to be immersed in an immersion liquid (31).