REGENERATION METHOD OF ACID FOR REGENERATION OF ION EXCHANGE RESIN, ION EXCHANGE RESIN REGENERATION DEVICE, AND COPPER ETCHING LIQUID REGENERATION APPARATUS USING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a regeneration method and regeneration apparatus of acid for the regeneration of ion exchange resin, which can, by recovering and regenerating the acid used for the regeneration of ion exchange resin, reduce the used amount of acid newly added, and reduce a treatment cost for the disposal of acid, and to provide a copper etching liquid regeneration apparatus using the same.;SOLUTION: A sulfuric acid 2 for regenerating ion exchange resin 4 having adsorbed copper is fractionated respectively according to the concentration of copper measured by a copper concentration measuring device 6 that has a copper concentration measuring means for measuring a copper concentration, and each fraction is regenerated by using a copper removal apparatus 8, a copper removal apparatus 12, and a copper removal apparatus 16 that have a copper removal means for removing different copper from each other.;COPYRIGHT: (C)2013,JPO&INPIT