首页> 外国专利> A method for the production of a composite body with a sintered layer and the sintering apparatus for the production of such a composite component.

A method for the production of a composite body with a sintered layer and the sintering apparatus for the production of such a composite component.

机译:一种具有烧结层的复合体的制造方法以及一种用于制造这种复合部件的烧结设备。

摘要

The present invention relates to a process for the production of a composite body (10), in particular of a composite body (10) for the construction of an electronic component, which in a finished state, which are connected to one another at least two partial bodies (12, 14), wherein the bonded connection by means of at least one in a joining direction (16) is provided between the partial bodies (12, 14) layer (18) is arranged is brought about, which is formed from a sintered material, characterized by the following steps:a) creating a arrangement of the at least two partial elements (12, 14) and the in the joining direction (16) between the at least two partial bodies (12, 14) arranged, at least one green layer (18) arranged to a composite body (10),b) placing the composite body (10) arranged in a first partial chamber (36) of an essentially gastight sealable sintering chamber (22) with chamber walls (26) and a substantially gas-impermeable room dividers (32), the sintering chamber (22) in the first partial chamber (36) and at least a second partial chamber (38), in the immediate vicinity of the partition (32), wherein the room dividers (32) at least one deformable portion (34) having its position relative to the chamber walls (26) is variable,c) producing a positive space pressure difference between the second partial chamber (38) and the first partial chamber (36), andd) heating the composite body (10) arranged at least up to a predetermined temperature in the form of a sintering temperature.Furthermore, the invention relates to a sintering device for the production of such a composite body (10).
机译:用于制造复合体(10)的方法技术领域本发明涉及一种制造复合体(10)的方法,特别是用于构造电子部件的复合体(10)的方法,所述电子部件在完成状态下彼此至少连接两个产生分体(12、14),其中,通过在分体(12、14)之间设置至少一个沿接合方向(16)的粘结连接,层(18)由以下方式形成:一种烧结材料,其特征在于以下步骤:a)在所述至少两个分体(12、14)之间形成所述至少两个分体(12、14)和沿所述接合方向(16)的布置,至少一个生坯层(18),其布置在复合体(10)上,b)将复合体(10)放置在具有腔室壁(26)的基本上气密的可烧结腔室(22)的第一部分腔室(36)中。 )和基本上不透气的隔墙(32),烧结室(22 )在第一局部腔室(36)和至少第二局部腔室(38)中,在分隔壁(32)的附近),其中,间隔壁(32)至少一个可变形部分(34)的位置相对室壁(26)的温度是可变的,c)在第二部分室(38)和第一部分室(36)之间产生正的空间压力差,以及d)加热至少布置到此外,本发明涉及一种用于生产这种复合体(10)的烧结装置。

著录项

  • 公开/公告号DE102012200034A1

    专利类型

  • 公开/公告日2013-07-04

    原文格式PDF

  • 申请/专利权人 ROBERT BOSCH GMBH;

    申请/专利号DE201210200034

  • 发明设计人 MICHAEL GUYENOT;

    申请日2012-01-03

  • 分类号C04B37/00;C04B35/34;H01L21/58;

  • 国家 DE

  • 入库时间 2022-08-21 16:21:49

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