The substrate support organicity metal chemical compound restoration device for vapor phase growth, the organicity metal chemical compound for solid-state vapor phase growth is enclosed at manufacturing method of the substrate support organicity metal chemical compound for vapor phase growth and

摘要

PROBLEM TO BE SOLVED: To provide: a carrier-supported organometallic compound for vapor-phase growth, capable of stably supplying an organometallic compound at a constant concentration for a long period without depending on the supplying device; a method for producing the same; and a carrier-supported organometallic compound filling device filled with the compound.;SOLUTION: The carrier-supported organometallic compound for vapor phase growth is produced by supporting an organometallic compound for vapor phase growth on a carrier being solid at ordinary temperature and inert to the organometallic compound, and then crushing the obtained carrier-supported organometallic compound. The carrier-supported organometallic compound does not contain a carrier-supported organometallic compound having a particle diameter of 0.84 mm.;COPYRIGHT: (C)2008,JPO&INPIT